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UL-Product Family: UL1000 (Fab)/UL3000 Fab (ULTRA)/UL5000

Mobile Vacuum Leak Detectors

INFICON GmbH

Fastest leak testing due to short start-up and suppression of helium background

Maximum service life through maximum robustness against shock ventilation and mechanical impacts

Fast and easy operation through intuitive user guidance

UL1000 - The industry standard for mobile vacuum leak testing with oil-sealed backing pump
UL1000 Fab - The industry standard for mobile vacuum leak testing with oil-free
UL3000 Fab/UL3000 Fab ULTRA - The latest generation of leak testers with oil-free pumps for highest demands
UL5000 - The specialist for highest requirements and large volumes
UL5000 - Courtesy of ITER.org: Leak testing of very large vacuum components for the experimental nuclear fusion reactor in France

Fast, robust and intuitive leak testing for highest demands in ultra-small leak rate detection

The INFICON UL product family of leak testers, is today the market leading standard for cost-effective helium vacuum leak testing in industry and especially in the very demanding semiconductor fabrication. The UL family of products represents the best possible compromise between high performance, unparalleled robustness and cost-effectiveness. The devices offer state-of-the-art detection limits of E-12 mbar*l/s with correspondingly short pump-down and response times.

Due to the ergonomic design of the units, they are particularly easy to handle and can be used without problems even in maintenance areas with limited space. The background suppression (I-ZERO) enables continuous leak testing at least two decades below the existing background level. T he UL3000 Fab and UL3000 Fab ULTRA represent the latest generation of leak testers with many improvements such as I- ZERO 2.0, MASSIVE-Mode and HYDRO-S. The UL5000 is specialized for very large test volumes of over 100 l.

UL1000 - The industry standard for mobile vacuum leak testing with oil-sealed backing pump

1

UL1000 - The industry standard for mobile vacuum leak testing with oil-sealed backing pump

UL1000 Fab - The industry standard for mobile vacuum leak testing with oil-free

2

UL1000 Fab - The industry standard for mobile vacuum leak testing with oil-free

UL3000 Fab/UL3000 Fab ULTRA - The latest generation of leak testers with oil-free pumps for highest demands

3

UL3000 Fab/UL3000 Fab ULTRA - The latest generation of leak testers with oil-free pumps for highest demands

UL5000 - The specialist for highest requirements and large volumes

4

UL5000 - The specialist for highest requirements and large volumes

UL5000 - Courtesy of ITER.org: Leak testing of very large vacuum components for the experimental nuclear fusion reactor in France

5

UL5000 - Courtesy of ITER.org: Leak testing of very large vacuum components for the experimental nuclear fusion reactor in France

Product classification

Applications

leak measurement

Product categories

density measuring systems
vacuum systems

Target Industries

Beverages
Biotechnology
Chemistry
Food
Pharma
Plastics

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UL1000 - The industry standard for mobile vacuum leak testing with oil-sealed backing pump

UL-Product Family: UL1000 (Fab)/UL3000 Fab (ULTRA)/UL5000

Mobile Vacuum Leak Detectors

INFICON GmbH